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Membrane Resonator of Silicon Nitride for Acoustic Signal Detection

Published : 2014
Autors: Ing. Vojtěch Svatoš , doc. Ing. Jan Pekárek, Ph.D. , Ing. Jaromír ŽákPh.D. , Ing. Jan Prášek, Ph.D. , doc. Ing. Jaromír Hubálek, Ph.D.

Key words:
membrane resonator, detection, acoustic signal


Resonant membrane made of a thin silicon nitride membrane with an electrode made of chrome-nickel is used for the detection of acoustic waves of a certain frequency. The silicon structure is manufactured using standard silicon-based technology and is contacted to a chip housing. Detection of the acoustic signal is based on the resonance of the membrane, which vibrates under the action of mechanical waves with a frequency of the same value as the natural frequency of the membrane material in this case SixNy formed by LPCVD.


CZ.1.05/1.1.00/02.0068 (CEITEC) , GAČR GA13-18219S , VUT IGA FEKT-S-14-2300



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