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Aerosol generator

Published : 2014
Autors: Dr. Stella Vallejos Vargas , doc. Ing. Jaromír Hubálek, Ph.D.

Key words:
Aerosol Assisted CVD


The unit with the ultrasonic atomizer forms the bottom of a liquid reservoir. The liquid has to be kept at a constant level of 50 mm. The piezoceramic transducer is driven by a high frequency RF generator and transmits ultrasonic waves which are focussed at the surface of the liquid. The aerosol output can be controlled by an external control voltage or a potentiometer


4SGA8678 (NanoApp) , CZ.1.05/2.1.00/03.0072 (SIX)



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