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MEMS cantilever resonator for sensor applications

Published : 2015
Autors: Ing. Imrich Gablech, Ph.D. , Ing. Jan Prášek, Ph.D.

Key words:
MEMS, gravimetric sensor, cantilever resonator, aluminium nitride


A gravimetric MEMS transducer comprising a piezoelectric cantilever resonator excited by the alternating voltage at its resonant frequency. Thin layer of aluminum nitride (AlN) is used as the piezoelectric material. The dimensions of the cantilevers created on the silicon substrate with SiO2 passivation layer are 200 x 800 microns. The lower electrode consists of a suitably oriented layer of titanium. The upper electrode is formed of gold. The sensitive layer is applied to the end of the cantilever. Variety of polymeric materials, metal oxides, etc. can be used for the gas detection.


CZ.1.05/1.1.00/02.0068 (CEITEC)



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