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Intor LabSensNano
 

Microtechnology

Manager: Ing. Pekárková Jana, Ph.D.
Members: Ing. Márik Marián , Ing. Pekárek Jan, Ph.D. , Ing. Svatoš Vojtěch

a) Complex design and simulation of novel MEMS structures regarding the mechanical, thermal and electrical effects on different parts or on complex MEMS structures. The simulations are performed using Coventor Ware and ANSYS software.

b) Fabrication of universal MEMS heating membrane covered with silicon nitride, silicon oxide or other non-conductive layers for different sensor applications.

  

Figure 1: Simulation of mechanical stress distribution depending on the temperature of a heating membrane (left) and thermo-mechanical simulation of a heating membrane for bolometer (right).

c) Realization of microbolometer with carbon nanotubes including modeling, fabrication and testing with heating membrane under maximized utilization area (fill factor). The bolometer-based imaging systems have to be able to respond to extremely low amplitude of incoming heat energy. Numerous features are pushed near to perfection, such as IR absorption, thermal isolation, bolometer response time and read-out integrated circuit (ROIC).

  

Figure 2: Heating membrane for bolometer (left) and SEM image of CNTs for bolometer (right).

d) Research focusing on design and experimental evaluation of the Micro Electro Mechanical System based on mechanical filter bank used as cochlear implant with low requirements to external power sources. Suitable electronic circuits and a system for sensor power supply using energy harvesting are employed.

e) Design of new dual electrode system for bioelectrical applications and long term potential measurements in aqueous culture medium for single cell. The novel nanoelectrode pair is realized on a silicon wafer. In order to avoid oxidation of nanoelectrodes, gold is chosen as the most suitable material. Main part of novel system is fabricated with lithography techniques and FIB etching. The pair of gold nanowires is grown via pulse electrochemical methods. The size of nanowires is ideal for measurements without unfavourable interactions between electrodes and a single cell.

  

Figure 3: SEM image of electrode system (left) and 3D model for electrical simulation of vertical nanoelectrodes (right).

f) Novel thin film two electrode system with perforated surface for electrochemical applications which simplifies the measurement operations in flow systems. Noble metals such as gold and standard lithographic and PVD techniques are used for realization. The detection in aqueous fluidics is provided using cyclic voltammetry.

  

Figure 4: 3D model of novel thin film electrode system (left) and SEM image of novel thin film electrode system (right).

Future plans: realization of MEMS sensor /include bioMEMS/, new type of thin film electrochemical and biochemical sensors. Important part of our future research is focused on memristor design and realization.

  • Thin film deposition – thermal evaporation and magnetron sputtering
  • Lithography techniques – UV lithography and EBL
  • Etching processes
  • Electrochemical processes
  • Focused Ion Beam processes
  • Simulations by Coventor Ware and Ansys
  • MEMS – design, simulation, realization
  • Thin film electrodes/sensors – design and realization
  • SEM/EDX/WDX techniques for characterization
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